Description: Wafer PN 1840A-12-5010A, SN 51838 ***** ThermalTRACK unit is NOT included in the auction. It is to display the operational performance of the wafer ******** Description: 300mm wafer with 17 RTD pointsALL RTD points workingAll points track within 0.1 C using an old calibration fileCalibration file provided on diskThird picture shows the tracking of all the RTD's62-pin sub-D connector on silicon sleeve wireIn original packaging: Wafer guard over wafer, heavy plastic corrugated container, no outer sleeveNew versions of this model Process Probe are still available from KLA for $6,527 with 9 week lead time (late 2020 pricing)Process Probe™ 1840In Situ WaferTemperature Monitoring System 0-250°CThe Process Probe™ 1840 instrumented wafers provide high accuracy, real-time hot plate temperature measurements, supporting processes such as photoresist track systems and wafer probers. The Process Probe 1840 allows direct measurement of wafer temperature stability and uniformity without dependence on imprecise process monitors or contact temperature sensors. With the Process Probe 1840, lithography engineers can characterize and fine tune the photoresist bake temperature uniformity, ensuring that advanced lithography processes meet the temperature accuracy required for achieving high yield. Applications: · Process development, Process qualification, Process tool qualification, Process tool matching· Lithography track post-exposure bake, Spin-on anti-reflective coatings, Back end probers No. 20
Price: 999 USD
Location: Garland, Texas
End Time: 2024-03-11T20:43:02.000Z
Shipping Cost: 10 USD
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Item Specifics
All returns accepted: ReturnsNotAccepted
Brand: KLA
MPN: Does Not Apply
